| 摘要 |
<P>PROBLEM TO BE SOLVED: To appropriately automating the manufacturing process of a photomask. <P>SOLUTION: A method for manufacturing a photomask is disclosed, including disposing a mask blank 10 on a mounting section of a rotating device, disposing the mask blank 10 on an exposure drawing machine 102 while controlling the direction of the mask blank 10 by the rotating device, and exposing and drawing an image. The method further includes: a defect information storing step of storing defect information in the mask blank having an identification marker 18 provided on an end face 22a, into an information storing device in association with the identification marker 18; a placement direction determining step of determining a placement direction of the mask blank 10 with respect to the exposure drawing machine 102; and a direction correcting step of controlling the rotation of the rotating device so as to control the direction of the mask blank to the determined placement direction. The placement direction determining step includes detecting the identification marker 18 of the mask blank by a detector, inquiring to the information storing device to obtain the defect information, and determining the placement direction based on the drawing information and defect information of the mask pattern. <P>COPYRIGHT: (C)2010,JPO&INPIT |
