| 摘要 |
PROBLEM TO BE SOLVED: To provide an inexpensive and miniaturizable crucible feeder mechanism with a simple configuration and the increased storage number of crucibles. SOLUTION: In this crucible feeder mechanism, crucibles are placed in parallel on a tilted placing surface 311, and each crucible sliding down along the placing surface 311 is collected into a crucible moving mechanism 313 provided on an outlet 312a by a tapered guide surface 312b. The crucible moving mechanism 313 is equipped on a peripheral surface part 3131a with a storage recess 3131x for storing crucibles, and is rotated and moved between a reception position where the slid-down crucible is received and a supply position where the crucible is dropped down in communication with a crucible supply port 314. COPYRIGHT: (C)2010,JPO&INPIT |
