发明名称 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 A semiconductor device includes: an insulating film including a porous insulating material and formed above a substrate; an interconnection wire including copper and buried in a groove formed at least in an obverse surface of the insulating film; and a barrier insulating film including an insulating material containing a nitrogen heterocyclic compound and formed over the insulating film and the interconnection wire.
申请公布号 US2010007020(A1) 申请公布日期 2010.01.14
申请号 US20090495201 申请日期 2009.06.30
申请人 FUJITSU MICROELECTRONICS LIMITED 发明人 TAKIGAWA YUKIO
分类号 H01L23/532;H01L21/768 主分类号 H01L23/532
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