发明名称 |
CHARGED PARTICLE BEAM ALIGNMENT METHOD AND CHARGED PARTICLE BEAM APPARATUS |
摘要 |
An object of the present invention is to provide a charged particle beam apparatus and an alignment method of the charged particle beam apparatus, which make it possible to align an optical axis of a charged particle beam easily even when a state of the charged particle beam changes. The present invention comprises calculation means for calculating a deflection amount of an alignment deflector which performs an axis alignment for an objective lens, a plurality of calculation methods for calculating the deflection amount is memorized in the calculation means, and a selection means for selecting at least one of the calculation methods is provided.
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申请公布号 |
US2010006755(A1) |
申请公布日期 |
2010.01.14 |
申请号 |
US20090564511 |
申请日期 |
2009.09.22 |
申请人 |
SATO MITSUGO;OTAKA TADASHI;EZUMI MAKOTO;TAKANE ATSUSHI;YOSHIDA SHOJI;YAMAGUCHI SATORU;OZAWA YASUHIKO |
发明人 |
SATO MITSUGO;OTAKA TADASHI;EZUMI MAKOTO;TAKANE ATSUSHI;YOSHIDA SHOJI;YAMAGUCHI SATORU;OZAWA YASUHIKO |
分类号 |
G01N23/22;H01J37/147;H01J37/28 |
主分类号 |
G01N23/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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