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发明名称
VERFAHREN UND VORRICHTUNG ZUR IONENSTRAHLBEARBEITUNG VON OBERFLÄCHEN
摘要
申请公布号
DE502004010464(D1)
申请公布日期
2010.01.14
申请号
DE200450010464T
申请日期
2004.10.29
申请人
ROTH & RAU AG
发明人
MAI, JOACHIM;ROTH, DIETMAR;RAU, BERND;DITTRICH, KARL-HEINZ
分类号
H01J37/305;H01J37/20;H01J37/317
主分类号
H01J37/305
代理机构
代理人
主权项
地址
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