Apparatus for the production of a charged particle beam, comprising: an ion source plasma chamber (104), having a door (106), and an accelerator (102) mounted on the face of the door remote from the ion source plasma chamber.
申请公布号
EP2143125(A1)
申请公布日期
2010.01.13
申请号
EP20080709638
申请日期
2008.02.21
申请人
NORDIKO TECHNICAL SERVICES LIMITED
发明人
HOLMES, ANDREW, JAMES, TIMOTHY;DAVIS, MERVYN, HOWARD