PLASMA GENERATOR AND PLASMA ETCHING DEVICE,申请号EP20040819806-传众专利搜索

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发明名称	PLASMA GENERATOR AND PLASMA ETCHING DEVICE
摘要
申请公布号	EP1699076(A4)	申请公布日期	2010.01.13
申请号	EP20040819806	申请日期	2004.11.29
申请人	SUMITOMO PRECISION PRODUCTS COMPANY LIMITED	发明人	HAYASHI, YASUYUKI;MURAKAMI, SHOICHI;HABE, TAKESHI;IKEMOTO, NAOYA
分类号	H01L21/3065;H05H1/46;H01J37/32	主分类号	H01L21/3065
代理机构		代理人
主权项
地址

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