| 摘要 |
PURPOSE: A device and a method for heating substrates are provided to maximize a working capacity by including a substrate support block loading a plurality of substrates and heating them. CONSTITUTION: In a device and a method for heating substrates, a block unit(10) comprises a plurality of supporting substrate blocks. The substrate support block is formed around a penetration hole which passes up and down. The supporting substrate block respectively has a support surface in which the substrate is contacted and supported. The supporting substrate block has support surfaces which are separated from each other. A heater(20) heats the substrate supported by the supporting surface of the supporting substrate block. The block unit and the heater can move relatively through penetration holes(111,121) to the upward and downward.
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