| 摘要 |
PURPOSE: A vacuum processing apparatus, a transporting method for a vacuum processing apparatus, and an assembling method for the vacuum processing apparatus are provided to reduce manufacturing costs by coupling the bottom, a side, and top of the device which are detachable. CONSTITUTION: The bottom surface(20) is installed on a substrate support portion. The substrate support portion(12) supports the substrate. A frame in which an outside composition connected to an internal configuration of the substrate is installed on the bottom. A side(22) is combined with the bottom. The top(24) is combined with the upper of the side and is detachable. Sealing members are interposed between the bottom, the side, and the top of the device.
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