Verfahren zur Herstellung von Schottky-Kontakten

摘要

Method of producing metal-semiconductor contacts (Schottky contacts) with precisely defined and preferably relatively small areas by uniformly coating a semiconductor surface with a layer of chromium, coating a layer of aluminum in a pattern corresponding to the desired contacts onto the chromium layer and etching the uncoated chromium layer areas with hydrochloric acid having a concentration of at least about 1 percent until corresponding areas of the semiconductor surface are exposed. The so-formed plurality of contacts on a semiconductor sample can be divided into individual components each having at least one such contact. Connection wires or the like are attachable directly to the aluminum area by thermo-compression or ultra-sonic bonding.