BREAKING APPARATUS, BREAKING METHOD, AND SYSTEM FOR DIVIDING MOTHER ADHERED SUBSTRATE

摘要

<P>PROBLEM TO BE SOLVED: To obtain a homogeneous cut face by reducing a cutting force added to a fragile material substrate of various shapes. Ž<P>SOLUTION: A first product table 13 and a second product table 14 are disposed on a slide table 11 and a tilting table 12, respectively, so that their edge parts have a specific angle. A substrate G in which both the faces are scribed is put on the tables and fixedly pressed by a first clamp bar 15a and a second clamp bar 16a. When the second product table 14 is rotated, a shearing force and a tension are applied to the substrate G at scribe lines S on by the clamp bar as a pressing point. As the result, the clamp bar with less clearance acts as a break point, and the substrate G is laterally divided into two parts. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž