| 摘要 |
Multilayer piezoelectric elements are required to have higher durability. However, conventionally, if a multilayer piezoelectric element is displaced greatly or driven at high speed, the element cannot absorb the stress to thereby increase self-heating due to the drive and cause cracks. This causes a problem that the multilayer piezoelectric element cannot be stably driven. A multilayer piezoelectric element (1) has a multilayer structure wherein piezoelectric layers (3) and internal electrode layers (5) are formed alternately, and the piezoelectric layer (3) has voids (11) each containing metal bodies (13). The voids (11) absorb the stress, and the metal bodies (13) inside the voids (11) can improve the heat conduction of the piezoelectric layer (3). Therefore the multilayer piezoelectric element (1) has excellent durability.
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