CAPACITANCE DETECTION TYPE MOVABLE SENSOR

摘要

Provided is a thin and compact movable sensor capable of detecting the amount of movement of a movable portion with high precision. A first movable portion (2) and a second movable portion (4) are coupled by a coupling link portion (10a) and a support link portion (20a), and when the first movable portion (2) moves closer to a fixed portion (50), the second movable portion (4) moves away from the fixed portion (50).  The fixed portion (50) is provided with a first fixed electrode (51) and a second fixed electrode (52), a first movable electrode facing the first fixed electrode (51) is provided on the surface (2a) of the first movable portion (2), and a second movable electrode facing the second fixed electrode (52) is provided on the surface (4a) of the second movable portion (4).  Since the first movable portion (2) and the second movable portion (4) move in opposite directions, the state of movement of the first movable portion (2) can be detected by obtaining the difference between a change in capacitance between the first fixed electrode (51) and the first movable electrode and a change in capacitance between the second fixed electrode (52) and the second movable electrode.