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发明名称
Ablenksignal-Kompensation für ein Strahl von geladenen Teilchen
摘要
申请公布号
DE602006010615(D1)
申请公布日期
2010.01.07
申请号
DE200660010615T
申请日期
2006.05.11
申请人
FEI CO.
发明人
HILL, RAYMOND;ROSENBERG, STEVE;DOWNER, DANIEL
分类号
H01J37/302;H01J37/147
主分类号
H01J37/302
代理机构
代理人
主权项
地址
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