| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a microlens substrate suitable for high resolution and having a precision microlens array, a manufacturing method of the microlens array substrate for manufacturing the microlens substrate with a high yield, a liquid crystal panel having this microlens array, a liquid crystal projector, a display, and an illuminator. <P>SOLUTION: The microlens array substrate 1 includes, in the surface of a quartz substrate or a glass substrate, a microlens array 8 constituted of a plurality of continuous concave microlenses 11 and an alignment mark 7 formed outside a microlens array region, wherein the microlens array 8 and the alignment mark 7 are simultaneously formed by a transfer method through dry etching. <P>COPYRIGHT: (C)2010,JPO&INPIT |
