摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser processing device enabling stable high precision processing. <P>SOLUTION: The laser processing device 1 processes a workpiece 100 by laser beam. The laser processing device 1 is provided with a laser source 6, a laser optical system 4 having a condenser lens 18 which condenses the laser beam emitted from the laser source 6 on the workpiece 100, a laser processing head 2 which forms a liquid pole by jetting liquid, and a pressurizing pump 8 which supplies the liquid to the laser processing head 2. The laser processing head 2 is arranged between the condenser lens 18 and the focal point M of the laser beam, and a liquid introduction part 14 is arranged in the condensed region R of the laser beam condensed by the condenser lens 18. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |