| 摘要 |
PROBLEM TO BE SOLVED: To provide the processing method and the regenerating method of silicon for the electronic industry, in which chemical reactions of impurity metals and carbon with silicon are inhibited in a silicon processing step and silicon recovering and regenerating steps to reduce contamination of silicon by the metals and carbon. SOLUTION: The processing method of silicon for electronic components includes processing a silicon ingot or a silicon wafer, and the regenerating method of silicon includes recovering silicon from silicon sludge containing processing waste produced by the processing and regenerating it as silicon for the electronic industry. In the methods, a gas which controls oxidation-reduction potential is added to a silicon surface to be processed or to a solution containing silicon shavings. COPYRIGHT: (C)2010,JPO&INPIT
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