| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a metal-ceramic composite target containing a precious metal, in which loss of a precious metal powder in a step of manufacturing the target can be reduced by uniformly mixing powders of a magnetic metal, a ceramic and the precious metal. Ž<P>SOLUTION: The method for manufacturing the metal-ceramic composite target containing the precious metal includes the steps of: uniformly depositing the ceramic powder onto a surface of the magnetic metal powder through a wet powder mixing step; drying the same to obtain a ceramic-metal composite powder; uniformly mixing the precious metal powder with the ceramic and metal powders through a dry powder mixing step; and converting the ceramic-metal composite powder into the molded target through molding and compression steps. The method for manufacturing can reduce the loss of the precious metal powder in the step for manufacturing the target by uniformly mixing the powders of the magnetic metal, the ceramic and the precious metal, thereby improving quality of the target and reducing its manufacturing cost. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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