| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a surface light-emitting laser provided with a two-dimensional photonic crystal, wherein damage of an active layer is reduced when the two-dimensional photonic crystal is manufactured, light from the active layer is efficiently introduced into the two-dimensional photonic crystal, and shape precision of a two-dimensional photonic crystal interface on a side close to the active layer is improved to achieve improvement in element characteristics. Ž<P>SOLUTION: The surface light-emitting laser includes the active layer and two-dimensional photonic crystal and has a resonance mode in an in-plane direction of the two-dimensional photonic crystal. The two-dimensional photonic crystal is constituted by arraying media which are made of semiconductor layers and holes and differ in refractive index cyclically in two dimensions, and has a mask for crystal growth suppression, used to suppress crystal growth of the semiconductor layers when the holes are formed, on the side closer to the active layer than to the holes. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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