LIFT PIN MODULE OF FPD MANUFACTURING MACHINE

摘要

PURPOSE: A lift pin module of a flat panel display is provided to prevent corrosion by positioning an elastic unit affected by the process gas outside of a device for manufacturing the flat panel display. CONSTITUTION: A lift pin module is lifted by a lifting plate in a device for manufacturing a flat panel display and supports a substrate. A lift pin(121) is lifted by the lifting plate through a lower wall of a chamber and supports the substrate load on the chamber. A sealing unit(123) surrounds the lift pin protruded to the outside of the lower wall of the chamber. An upper side of the sealing unit is connected to the lower wall of the chamber. The lower side of the sealing unit is connected to the lifting plate. An elastic unit(125) is included in an outer side of the sealing unit and provides the elastic force with regard to the lifting plate.