| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a circuit resistance contraction method capable of improving the working efficiency of EM inspection by preventing the occurrence of pseudo-errors. Ž<P>SOLUTION: In each wiring layer M1, M2, a plurality of wiring resistances RM1, RM2 divided by a plurality of via holes VH are made to contract by two wiring resistors RM11, RM21 each having equivalent value which are connected in series, and corresponding mutual median points of the respective wiring layers are short-circuited and serves as node n45. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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