INFRARED SENSOR AND MANUFACTURING METHOD OF THE SAME

摘要

PURPOSE: An infrared sensor and a manufacturing method of the same are provided to detect a body and a room temperature in confined space by controlling an body perception effective angle through MEMS(Microelectromechanical Systems) process. CONSTITUTION: In a device, a membrane structure is formed on a first substrate(110). An insulating film(120) is formed on the first substrate. An sensing infrared ray film(130) is formed on the membrane structure of the insulating film. The sensing infrared ray film senses the infrared ray transmitting an infrared ray absorption film(220). A pair of electrodes(140,141) are connected to an external circuit in order to transfer a sensing signal of the sensing infrared ray film. A second substrate(210) is arranged on the insulating film in order to support the infrared ray absorption film. The infrared ray absorption film absorbs the infrared ray of 8-10μm wavelength.