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发明名称
COATING DEVICE AND COATING FILM FORMING METHOD
摘要
申请公布号
EP1577930(A4)
申请公布日期
2010.01.06
申请号
EP20030780822
申请日期
2003.12.17
申请人
TOKYO ELECTRON LIMITED
发明人
SHITE, HIDEO
分类号
B05C11/08;G03F7/16;H01L21/00;H01L21/027;(IPC1-7):H01L21/027
主分类号
B05C11/08
代理机构
代理人
主权项
地址
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