FILM-FORMING APPARATUS, FILM-FORMING METHOD AND RECORDING MEDIUM,申请号KR20077022529-传众专利搜索

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发明名称	FILM-FORMING APPARATUS, FILM-FORMING METHOD AND RECORDING MEDIUM
摘要
申请公布号	KR100935483(B1)	申请公布日期	2010.01.06
申请号	KR20077022529	申请日期	2006.04.03
申请人		发明人
分类号	H01L21/205;H01L21/336	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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