| 摘要 |
<p>A controllable reflecting device having an array of bi-axial mirrors that are capable of pivoting in at least four directions is described. Each micro-mirror of the micro-mirror array is supported through a torsion pivot by a yoke attached by a second coplanar orthogonal torsion pivot to the mirror array support. The mirror and yoke are electrically conductive to a common node on the mirror array support shared by all the mirror/yoke assemblies. Under each mirror/yoke assembly the mirror array support has four plate areas electrically isolated from each other and the mirror/yoke assembly. In response to electrical signals from driver switches integrated in the mirror array support, these plate areas, driven in pairs, selectively provide an electric field with respect to the common node. This electric field attracts the mirror and yoke to facilitate movement of the mirror/yoke assembly to a desired reflecting state.</p> |
