| 摘要 |
In a supporting member, a carrier and a supporting method, a supporting member main body is turnably attached. The supporting member main body has a plurality of protruding sections radially extending from a turning center shaft. Since a substrate is supported by making the protruding sections abut to an end section of the substrate, generation of cracks of the substrate is prevented, and the service life of the supporting member main body can be lengthened. |
