| 摘要 |
A method of fabricating a shuttle wafer is provided. First, a wafer including a number of shots is provided. Each of the shots includes a number of dies. A material layer is then formed on the wafer. After that, a shuttle mask having a number of IC designs is provided. A first IC design corresponds to a first die of each of the shots. A portion of the IC designs on the shuttle mask is covered for exposing the first IC design. Thereafter, the first IC designs of the shuttle mask are transferred onto the material layer, so as to form at least an effective IC pattern on the first die of each of the shots and to form an ineffective IC pattern on each of the other dies of each of the shots.
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