The invention relates to a method for producing metal oxide layers from oxides of rare earth metals on silicon-containing surfaces, to the device used to carry out the coating method, and to the use of the starting materials used in the method according to the invention for the coating method.
申请公布号
WO2009156415(A2)
申请公布日期
2009.12.30
申请号
WO2009EP57855
申请日期
2009.06.23
申请人
CARL VON OSSIETZKY UNIVERSITAET OLDENBURG;SCHNARS, HANNO;AL-SHAMERY, KATHARINA;WICKLEDER, MATHIAS;AHLERS, MAREIKE
