MOVABLE STRUCTURE AND OPTICAL SCANNING MIRROR USING SAME

摘要

An impact resistance is enhanced by preventing hinges from being damaged even if an impact is provided from the outside thereto in a semiconductor machine structure. An optical scanning mirror (1) comprises a movable plate (2), the pair of hinges (3) which have one ends connected to both sides of the movable plate (2), respectively, and which form one swing axis of the movable plate (2), a fixed frame (4) so disposed as to surround the movable plate (2) and supporting the other ends of the hinges (3), and stopper parts (6) formed on the fixed frame (4).  When the movable plate (2) is displaced sideways, the stopper parts (6) are brought into contact with the side edges of the recesses (2e) of the movable plate (2), and the displacement of the movable plate (2) sideways is restricted.  Consequently, the hinges (3) are prevented from being damaged even if an impact is provided from the outside thereto.