| 摘要 |
PURPOSE: An apparatus and a method for processing a substrate are provided to load, process and unload a substrate by a support table, thereby slimming the substrate and reducing tact time of processing the substrate. CONSTITUTION: A processing unit is crossed with a transfer line at a predetermined location. The transfer line comprises the first transfer line(18) and the second transfer line(20). A side table(10) moves along with the first transfer line and supports parts around the substrate to pass the processing unit. A center table(12) moves along with the second transfer line. The center table is separated from or bonded with the side table, supports the central part of the substrate and moves the substrate. |
