摘要 |
The present invention relates to a microwave plasma deposition process and apparatus for producing diamond, preferably as single crystal diamond (SCD). The process and apparatus enables the production of multiple layers of the diamond by the use of an extending device to increase the length and the volume of a recess in a holder containing a SCD substrate as layers of diamond are deposited. The diamond is used for abrasives, cutting tools, gems, electronic substrates, heat sinks, electrochemical electrodes, windows for high power radiation and electron beams, and detectors. |
申请人 |
MICHIGAN STATE UNIVERSITY;FRAUNHOFER USA;ASMUSSEN, JES;GROTJOHN, TIMOTHY;REINHARD, DONNIE;RAMAMURTI, RAHUL;YARAN, M., KAGAN;SCHUELKE, THOMAS;BECKER, MICHAEL;KING, DAVID |
发明人 |
ASMUSSEN, JES;GROTJOHN, TIMOTHY;REINHARD, DONNIE;RAMAMURTI, RAHUL;YARAN, M., KAGAN;SCHUELKE, THOMAS;BECKER, MICHAEL;KING, DAVID |