发明名称 |
Radiation-sensitive resin composition |
摘要 |
A radiation-sensitive resin composition suitable as a chemically-amplified resist useful for microfabrication utilizing various types of radiation such as deep ultraviolet rays represented by a KrF excimer laser or ArF excimer laser. The radiation-sensitive resin composition of the present invention comprises: (A) a resin comprising a recurring unit (1-1) shown by the following formula (I-1) and (B) a radiation-sensitive acid generator such as 1-(4-n-butoxynaphthyl)tetrahydrothiophenium nonafluoro-n-butanesulfonate. The radiation-sensitive resin composition may further comprise (C) an acid diffusion controller such as phenylbenzimidazole.
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申请公布号 |
US7638261(B2) |
申请公布日期 |
2009.12.29 |
申请号 |
US20090348171 |
申请日期 |
2009.01.02 |
申请人 |
JSR CORPORATION |
发明人 |
NISHIMURA YUKIO;ISHII HIROYUKI;NISHIMURA ISAO;KOBAYASHI EIICHI |
分类号 |
G03F7/00;G03F7/004;G03F7/039 |
主分类号 |
G03F7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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