发明名称 Semiconductor memory device and fabrication method thereof
摘要 A method for fabricating a semiconductor memory device. A pair of neighboring trench capacitors is formed in a substrate. An insulating layer having a pair of connecting structures therein is formed on the substrate, in which the pair of connecting structures is electrically connected to the pair of neighboring trench capacitors. An active layer is formed on the insulating layer between the pair of connecting structures so as to cover the pair of connecting structures. A pair of gate structures is formed on the active layer to electrically connect to the pair of trench capacitors. A semiconductor memory device is also disclosed.
申请公布号 US7638391(B2) 申请公布日期 2009.12.29
申请号 US20070951270 申请日期 2007.12.05
申请人 NANYA TECHNOLOGY CORPORATION 发明人 CHENG CHIEN-LI;LIN SHIAN-JYH;HUANG MING-YUAN
分类号 H01L21/8242;H01L27/108 主分类号 H01L21/8242
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