Excitation in micromechanical devices

摘要

A resonant structure for a micromechanical device includes a crystalline silicon beam and at least one mass attached to the beam. An excitation plane of the resonant structure is defined by the predominant motion of the excited resonant structure. The beam includes crystal axes aligned such that none of the crystal axes are parallel to the length of the beam and/or none of the crystal axes are normal to the excitation plane.