发明名称 MANUFACTURING METHOD OF REPRODUCING HEAD
摘要 <P>PROBLEM TO BE SOLVED: To provide a manufacturing method of reproducing head which can form with high accuracy a reproducing head, including a magneto-resistance effect type reproduction element of a CPP structure by preventing variations in shape of a bias application layer, and thereby can stabilize reproduction output. Ž<P>SOLUTION: The manufacturing method of reproducing head comprises: a process of forming a magneto-resistance effect layer on a workpiece; a process of forming a mask layer in which patterning is carried out on the magneto-resistance effect layer; a patterning process to etch the magneto-resistance effect layer of an area in which the mask layer is not formed; a process of forming an insulation layer and the bias application layer on the whole surface one by one; a process of forming a metal layer on the whole surface, and laminating, it until the top surface of metal layer becomes higher than the top surface of the bias application layer at least in an area in which the mask layer is not formed; and a planarizing process of polishing the metal layer and the bias application layer until the top surface of the mask layer on the magneto-resistance effect layer is exposed. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
申请公布号 JP2009301662(A) 申请公布日期 2009.12.24
申请号 JP20080155913 申请日期 2008.06.13
申请人 FUJITSU LTD 发明人 AKIE MASANORI
分类号 G11B5/39 主分类号 G11B5/39
代理机构 代理人
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