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发明名称
Verfahren und Anordnung zur Stabilisierung eines Arbeitspunktes von reaktiven, plasmagestützten Vakuumbeschichtungsprozessen
摘要
申请公布号
DE102005015587(B4)
申请公布日期
2009.12.24
申请号
DE200510015587
申请日期
2005.04.05
申请人
VON ARDENNE ANLAGENTECHNIK GMBH
发明人
MILDE, FALK;REHN, STANLEY;MEYER, JENS
分类号
C23C14/54
主分类号
C23C14/54
代理机构
代理人
主权项
地址
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