| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a probe card compatible with improvement in a number of simultaneous measurement and an electrode density of a semiconductor device while ensuring a space generating no short circuit between connecting pins. Ž<P>SOLUTION: The probe card includes a probe substrate on which a ground probe, a signal probe, a power probe, a first ground electrode, a first signal electrode, and a first power electrode are provided; a card substrate on which a second ground electrode, a second signal electrode, and a second power electrode, which are connected, respectively, to the first ground electrode, the first signal electrode, and the first power electrode, provided on the probe substrate; and a ground connecting cable for connecting the first ground electrode provided on the probe substrate and the second ground electrode provided on the card substrate, a signal connecting pin for connecting the first signal electrode and the second signal electrode, and an electrode connecting pin for connecting the first power electrode and the second power electrode. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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