POLYMER FOR FORMING ORGANIC ANTI-REFLECTIVE COATING LAYER, WHICH IS SOLUBLE IN ALKALI SOLUTION, AND COMPOSITION INCLUDING THE SAME

摘要

PURPOSE: A polymer for forming organic anti-reflective coating layer and a composition comprising the same are provided to reduce the loss which occur during an etching process, to enable micro patterning, and to reduce etching burden in an etching process of a substrate. CONSTITUTION: A polymer for forming organic anti-reflective coating layer has a structure represented by chemical formula 1. In chemical formula 1, R1 is hydrogen(H) or methyl group(-CH3); R2 is sulfur(S) or oxygen(O); R3 is C1-20 group with an end of a hydroxyl group; R4 is an alkyl group or cycloalkyl group; a, b and c are the weight% of repeating units consisting the polymer and are respectively 1~98 weight%, 1~98 weight% and 1~98 weight%.