| 摘要 |
PURPOSE:To eliminate a difference in spectral characteristic of a filter by providing a color separation filter on the photoreceiving face of a solid image pickup element through an intermediary of protecting film with a smooth surface. CONSTITUTION:A protecting film 25a the surface of which is smoothed at about 0.5 or below in roughness through rotary application of Si compound dissolved in alcohol is formed on the surface of a CCD solid image pickup element 1 in frame transfer system which is formed on a p-type Si 21. Next, a photosensitive colored layer is formed, which is subjected to plate making and coloring to provide a layer 26R, a clear intermediate protecting film 28 is provided to prevent contamination of the second color and on, a layer 26G is then provided, the procedure of which is repeated to obtain a transparent protecting film on the uppermost layer. According to this method, a film thickness of the colored layer is uniform, and a color separation filer having a constant spectral characteristic can be arranged. Then, because of such a solid image pickup device using only one solid image pickup element, a matter of registration is not involved, and a prism is not particularly required, hence presenting a miniature and light device. |
