发明名称 |
TFT LCD array substrate and manufacturing method thereof |
摘要 |
A TFT LCD array substrate and a manufacturing method thereof. The TFT LCD array substrate includes a substrate and a pixel array on the substrate. Each pixel has: a gate line and a gate electrode formed on the substrate; a gate insulating layer formed on the gate line and the gate electrode; a semiconductor layer formed on the gate insulating layer disposed on the gate electrode; an ohmic contact layer having two parts, which are disposed on two sides of the semiconductor layer respectively and are apart from one another; an isolation insulating dielectric layer covering the substrate and the gate insulating layer except a portion on which the semiconductor layer is formed; a pixel electrode formed on the isolation insulating dielectric layer and the ohmic contact layer over the semiconductor layer; a source/drain electrode formed on the pixel electrode over the ohmic contact layer, and a passivation layer at least covering the semiconductor layer. The TFT LCD array substrate can be manufactured with a 3Mask technology, thereby the process steps are reduced and the utilization ratio of the equipment is improved. |
申请公布号 |
US7635616(B2) |
申请公布日期 |
2009.12.22 |
申请号 |
US20070752475 |
申请日期 |
2007.05.23 |
申请人 |
BOE OPTOELECTRONICS TECHNOLOGY CO., LTD. |
发明人 |
DENG CHAOYONG;RIM SEUNG MOO |
分类号 |
H01L21/00;H01L21/302;H01L21/461 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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