发明名称 PHOTOSENSITIVE RESIN COMPOSITION AND PHOTOSENSITIVE ELEMENT
摘要 <P>PROBLEM TO BE SOLVED: To provide a photosensitive resin composition capable of forming an image by a thick film, reducing water absorption property sufficiently, and being favorably used in the application of an interlayer insulation film or the like. <P>SOLUTION: This photosensitive resin composition contains (A) polyamic acid having a 5-20C alkylene chain or alicyclic skeleton in a main chain, (B) a photopolymerizable compound having an epoxy resin containing a vinyl group, and (C) a photopolymerization initiator. <P>COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2009294538(A) 申请公布日期 2009.12.17
申请号 JP20080149737 申请日期 2008.06.06
申请人 HITACHI CHEM CO LTD 发明人 TANIMOTO AKITOSHI;KATO SADAAKI;UENO TAKUMI
分类号 G03F7/037;C08G59/16;C08G73/10;G03F7/004;G03F7/027;H01L21/027 主分类号 G03F7/037
代理机构 代理人
主权项
地址