发明名称 POLISHING APPARATUS AND POLISHING METHOD
摘要 PURPOSE: A polishing device and a polishing method are provided, which can form flat surface by restraining twisting and loosening of a grinding tape. CONSTITUTION: A polishing device comprises a polishing head(4), a support unit, and a work rotary unit. The grinding tape is installed to the polishing head. The support unit rotates the polishing head by pressing the grinding tape to an object to be polished. The polishing head comprises a grinding tape, supply reels(62a,62b), contact rollers(41a,41b), and winding reels(61a,61b). The supply reel supplies the grinding tape. The contact roller brings the provided grinding tape into contact with the object to be polished. The winding reel reels the grinding tape passing through the contact roller. The grinding tapes are rolled reversely at the same time.
申请公布号 KR20090129938(A) 申请公布日期 2009.12.17
申请号 KR20090033937 申请日期 2009.04.20
申请人 NIHON MICRO COATING CO., LTD. 发明人 MATSUMOTO YASUO;YAMAGUCHI NAOHIRO
分类号 B24B21/00;B24B21/12;H01L21/304 主分类号 B24B21/00
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