VERTICAL DEFLECTING TILTING MICRO-MIRROR FOR A SPATIAL LIGHT MODULATOR IC AND METHOD TO FABRICATE SUCH A DEVICE

摘要

The present invention relates to the replacement of optical masks by a spatial-light modulator (SLM) and a method for manufacturing said SLM. An SLM is a series or grid of mirrors on a substrate, such as silicon, used to reflect light in a predetermined manner. The present invention relates further to an integrated device comprising a grid of mirrors, each mirror comprising a substantially flat surface, and an electronic controlling unit, wherein each mirror comprises one or more flexible bridges, which one or more bridges are adjustable to compensate for height differences between mirrors, caused by the non-flatness of the substrate of the device.