| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To manufacture an ultra-small variable aperture apparatus as a stacked structure by using a plating process, other metal-layer formation process, and an etching process, and also to make small a shaking of a diaphragm blade as a movable member, which is caused due to the clearance around a shaft. <P>SOLUTION: The stacked structure which includes at least one movable member which is movable, and a guide shaft which regulates a movement of the movable member, and which is manufactured by using the metal layer formation process and the etching process. A groove portion having a first distance and a groove portion having a second distance are formed continuously in the movable member, and the second distance is smaller than the first distance. A guide shaft regulates a movement of the movable member along the groove portion having the second distance. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
