Flap resonator, method of manufacturing a flap resonator, and integrated circuit including the flap resonator

摘要

Flap resonator, comprising a first electrode and a second electrode, the second electrode comprising a support part separated from an adjacent end of the first electrode by a dielectric part, and a beam part extending from said support part and over at least a part of a surface of the first electrode. The support part has an effective width that is smaller than the width of the beam part.