发明名称 |
ELECTROSTATIC CHUCK AND SUBSTRATE TEMPERATURE CONTROL FIXING APPARATUS |
摘要 |
There is provided an apparatus including: an electrostatic chuck for holding an object; and a base plate which supports the electrostatic chuck and controls a temperature of the electrostatic chuck. The electrostatic chuck is fixed onto the base plate via an adhesive layer. The electrostatic chuck includes: a base; an electrostatic electrode built in the base; and a mounting portion containing a dielectric material and detachably mounted on the base. The object is mounted on the mounting portion.
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申请公布号 |
US2009310274(A1) |
申请公布日期 |
2009.12.17 |
申请号 |
US20090482901 |
申请日期 |
2009.06.11 |
申请人 |
SHINKO ELECTRIC INDUSTRIES CO., LTD. |
发明人 |
KOYAMA TOMOAKI;TAMAGAWA KOKI |
分类号 |
H01L21/683 |
主分类号 |
H01L21/683 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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