| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a film structure including a plurality of different materials disposed on its surface and having an excellent surface planarity. Ž<P>SOLUTION: The method for manufacturing a film structure includes the steps of: disposing a second film to cover a first film on a substrate having the first film formed thereon; forming a first stopper film capable of regulating a polishing progress on the second film disposed on the first film; forming a second stopper film capable of regulating the polishing progress on the second film disposed on the substrate; disposing a third film on the first and second stopper films; polishing the upper surface of the third film until the polishing progress is regulated by the first stopper film; removing the first stopper film; polishing, after the removal of the first stopper film, the upper surfaces of the second and third films until the polishing progress is regulated by the second stopper film; and removing the second stopper film. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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