| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processing system capable of reducing an amount of collected data which are transmitted from a substrate processing apparatus and stored in a database. SOLUTION: The substrate processing apparatus 1 has: a substrate processing apparatus 10 which processes a substrate; and a server apparatus 16 (data collector) which collects data to be transmitted from the substrate processing apparatus 10. On the server apparatus 16, a collection interval management program 20 operates. The collection interval management program 20 has: a collection interval control part 210 (control means) which controls collection intervals of the data based on temporal variation of a data value; and a data receiving part 204 (data acquisition means) which acquires the data from the substrate processing apparatus 10 at the collection intervals controlled by the collection interval control part 210. COPYRIGHT: (C)2010,JPO&INPIT
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