| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a technique for preventing formation of a probe mark on a surface of a test pad in performing probe inspection using a probe card having a probe. <P>SOLUTION: An opening part on the pad 32 includes an opening part 33 opened on a surface of a chip 31, and an opening part 34 opened on a bottom part of the opening part 33 and reaching the pad 32. The opening part 33 includes a plane size larger than the opening part 34. With a predetermined amount of conductive fluid 36 filled only in the opening parts 33, 34, a chip end of a probe needle 15 is brought into in contact with the conductive fluid 36 and electric conduction between the pad 32 and the probe needle 15 is made without contacting the probe needle 15 with the pad 32 to perform the probe inspection. <P>COPYRIGHT: (C)2010,JPO&INPIT |
