| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an error correction apparatus of an optical inspection apparatus for three-dimensionally observing a to-be-inspected object by a color image. Ž<P>SOLUTION: The correction apparatus for the optical inspection apparatus is used for the optical inspection apparatus for obtaining an image of an appearance of the to-be-inspected object on an inspection bench by a first light, dividing a second light having a wavelength different from the first light into a reference light and a measurement light, and obtaining the three-dimensional image of the to-be-inspected object by obtaining an image of an interference pattern corresponding to a height of the to-be-inspected object. The correction apparatus for the optical inspection apparatus comprises: a storage apparatus for storing first data regarding the inspection bench when the image of the to-be-inspected object is obtained by the first light, and second data regarding the inspection bench when the interference pattern of the to-be-inspected object is obtained by the second light; and a controller for calculating a difference between the first and second data, and storing it to the storage apparatus. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
|
